EUV

Code for modeling, designing, and measuring EUV photomasks.

Apps: Standalone MATLAB applications for reflectometry, scatterometry, and Zernike phase contrast imaging.

Diffraction: Reciprocal-space coordinate transforms; square-wave diffraction.

Elemental nk: Calculating refractive indices of materials for EUV wavelengths.

Film models: Empirically determined film models for 3 absorbers: 131 (60nm TaN), 073 (2-layer aPSM), 074 (3-layer aPSM).

Fourier: Fourier transforms.

Fresnel: Fresnel reflection and transmission coefficients w/transfer matrix method.

Imaging: Partially coherent imaging.

Optimization: Optimization algorithm: coordinate descent with golden-section search, exponentially-weighted moving average (EWMA); i.e. each coordinate 1D line search, update coordinate reducing step by factor alpha, equivalent to "forgetting factor" in EWMA.

PanoramicAPIFuncs: Code to interface with Panoramic EM-Suite API, to run RCWA and FDTD simulations through EM-Suite.

PhaseLift: Solver for PhaseLift.

Reflectivityapp: Outputs from App for 3 masks referenced in "Film models".

Scattering: Fresnel transfer functions and near-field double-scattering approximation .

Utilities: Misc functions.